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Making Excited Oxygen Molecules and Atoms

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Part Number:N0001592
The oxidation of semiconductors and high-temperature superconductors could be achieved at lower temperatures than in current fabrication processes by use of oxygen molecules or atoms that have been raised into specific excited states. The use of excited oxygen (or other species) is also of interest in research on the kinetics and mechanisms of chemical reactions. NASA Tech Brief. 8.5" x 11"